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Small-scale PVD system--STN-500C

(STN-500C)
Small-scale PVD system--STN-500C manufacturer & Supplier

Product Feature

The coating system was specially designed for middle size products functional coating purposes with high productivity. The vacuum chamber unit has a cylinder design with one door opened on the front of the process chamber and 6 (six) cathode Arc Ion Sources.

The system is supplied with all necessary manifolds, valves, traps, controls, vacuum gauges and piping to achieve operating vacuum pressure.

The pumping system is controlled through the PLC supplied with the equipment. All necessary information to the vacuum system is displayed on a colored PLC touch screen.

Inner size of the chamber --- Diameter: 600-800mm; Height: 600mm-1000mm
Vacuum pumping system --- Oil diffusion pump + Root's pump + Rotary pump
Controlling system --- PLC & Touch Screen or PLC & PC
Ionization source & Bias power supply --- Number of targets: 4-8; Power of BIAS: 10kW-20kW

Product Specifications

Model STN-500C
Process Chamber Dia800mm*H800mm

Pumping System
Backing Pump
Rotary vane pump with 108m3/h

Roots Pump
Roots pump with 1080m3/h

Diffusion Pump
Oil diffusion pump with 28080m3/h

Hold Pump
Rotary vane pump with 54L/s

System Control PLC touch screen

Cathodes 6 unit

Cathodes Power Max 160A

Bias Power Supply 30KW,0-1000V

Process Gas System 500sccm 2 unit
1000sccm 2 unit

Heating System 0-12KW , PID contol

Power 380V three phase four line



Driving System 6*4unit,rotation,revolution

Driving Control 0-18rpm (variable)

Cooling Water System PL-08 (optional)

Oven 8KW,800*800*1000mm (optional)


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